delayer:decoration
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| delayer:decoration [2012/02/21 01:55] – created mcmaster | delayer:decoration [2013/04/07 04:06] (current) – removed mcmaster | ||
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| - | Decoration as called by Fredrick Beck is the process of making parts stand out better. | ||
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| - | ====== Copper sulphate ====== | ||
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| - | Copper sulphate will bring out n-diffusion areas of pn junctions when illuminated (FIXME: how strong?). Chemistry is something like: | ||
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| - | Cu+2 + 2 e- ======> Cu | ||
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| - | Si + 4 HF + 2 CuSO4 ======> SiF4 + 2 Cu + 2 H2SO4 | ||
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| - | At higher temperatures, | ||
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| - | ====== Periodic Acid Etchant ====== | ||
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| - | Good at showing where doping changes. Strong etch rate dependence on illumination. Room temp: mostly etches highly doped areas, especially p+ with max conc 10**18 atoms / cm**3 Increased illumination favors weaker doping. | ||
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| - | * 20-50 seconds | ||
| - | * 50 mL H2O | ||
| - | * 5 g H5IO6 (periodic acid) | ||
| - | * 5 mg KI | ||
| - | * 2 mL 48 % HF | ||
| - | * Must be added in given order | ||
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| - | ====== Permanganate Etchant ====== | ||
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| - | 3 mL KMnO4 | ||
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| - | 97 mL 48 % HF | ||
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| - | 5.5 um / min on <111> @ 23C | ||
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| - | ====== Bichromate Etchant ====== | ||
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| - | Brings out n doped areas. Use 1:10 diluted Secco etchant. : H2O | ||
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| - | ====== Silicon etchant p ====== | ||
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| - | * 20 mL acetic acid | ||
| - | * 1 mL 40% HF | ||
| - | * 3 mL 65% HNO3 | ||
| - | * 1-3 seconds | ||
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| - | ====== Staining etchant ====== | ||
| - | * 12 mL 65 % HNO3 (works without nitric if just exposed to air?) | ||
| - | * 200 mL 48% HF | ||
| - | * 5-10 seconds | ||
delayer/decoration.1329789350.txt.gz · Last modified: 2013/10/20 14:59 (external edit)
