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--- honeywell_awm2100v [2013/01/24 05:42] – azonenberg
+++ honeywell_awm2100v [2025/08/04 21:23] (current) – external edit 127.0.0.1
@@ Line 1: / Line 1: @@
-{{tag>collection_az vendor_honeywell type_sensor/airflow type_mems}}
+Moved to [[azonenberg:honeywell:awm2100v]]
-Honeywell AWM2100V mass airflow sensor ([[http://sensing.honeywell.com/product%20page?pr_id=25698]])
-Blog posts:
-  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown-part-2.html]]
-  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown.html]]
-====== Package ======
-{{:azonenberg:honeywell:s7302834.jpg?600|}}
-{{:azonenberg:honeywell:s7302837.jpg?600|}}
-====== Board ======
-Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet.
-{{:azonenberg:honeywell:s7302830_sm.jpg?600|}}
-====== Die ======
-One layer of polysilicon resistor plus one layer of gold metalization.
-Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane.
-{{:azonenberg:honeywell:pressure_sensor_neo10x_sm_annotated.jpg?600|}}